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    賽默飛定制版SEM主動隔振系統

    簡要描述:賽默飛定制版SEM主動隔振系統
    SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform.

    • 產品型號:SEM Base LP
    • 廠商性質:生產廠家
    • 更新時間:2020-07-11
    • 訪  問  量:657
    詳細介紹

    賽默飛定制版SEM主動隔振系統

    Overview

    SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform. SEM-Base LP is easier to install, provides outstanding performance, and is ergonomically optimized. The compact design facilitates installation without lifting the Scanning Electron Microscope (SEM) column with anything other than the SEM’s built-in leveling feet. And, once installed, the SEM’s height above the floor does not increase. SEM-Base LP incorporates our unique STACIS piezo technology and has the same vibration cancellation performance as our industry-standard SEM-Base VI. SEM-Base LP includes casters and is designed specifically to integrate with many Thermo Fisher Scientific (formerly FEI) tools.

    賽默飛定制版SEM主動隔振系統

    Example of how SEM-Base LP integrates with the bottom frame of the tool

     

    Compatible Thermo Fisher Tool Models

    SEM-Base LP is compatible with many Thermo Fisher Scientific models including:

    ●Apreo

    ●Aquilos

    ●Helios Small DualBeam

    ●Nova NanoSEM x50

    ●Quattro S

    ●Scios

    ●Teneo

    ●Verios G4

    ●Verios 460, 460L

    ●Versa 3D

     

    If your SEM/FIB is not listed, contact TMC to check for compatibility.

     

    The SEM-Base Advantage

    Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.

    Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.

    Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

     

    Performance

     

    1800 lbs (818 kg) payload tested with simulated vibration at VC-C

    (500 μin./s, 12.5 μm/s RMS)

    Specifications

    Performance Specifications

    Active degrees of freedom

    6

    Active bandwidth

    0.6 Hz - 100 Hz

    Passive natural frequency

    12 Hz nominal

    Effective active resonant frequency

    0.5 Hz

    Isolation at 1 Hz

    40% - 70%

    Isolation at 2 Hz

    90%

    Isolation at ≥3 Hz

    90-98%

    Internal noise

    <0.1 nm RMS

    Operating load range

    900 - 2,500 lbs (408 - 1134 kg)

    Magnetic field emitted
    at maximum 4 in.(102 mm)
    from the platform

    <0.02 μG broadband RMS

     

    Design, Dimensions, and Environmental and Utility Requirements

    Environmental and safety

    CE and RoHS compliant

    Active isolation elements

    High-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC

    Passive isolation element

    single stiff elastomer (no compressed air supply required)

    Vibration sensor elements

    Downward facing geophone type inertial sensors
    that measure floor vibration below the isolator
    and deliver voltage proportional to the velocity of vibration motion

    Active feedback control loop

    Floor vibration is measured, processed
    and attenuated below the spring
    supporting the isolated surface

    Dimensions (WxD)

    33.3 x 34.9 in. | 846 x 887 mm
    41 x 34.9 in. | 1041 x 887 mm total with casters

    Height

    5.26 in. (134 mm) nominal,
    doesn't change when SEM-Base is switched off

    Operating temperature

    50° - 90° F
    10° - 32° C

    Storage temperature

    -40° - 130° F
    -40° - 55° C

    Humidity

    < 80% @ 68° F | 20° C

    System power requirements

    100, 120, 230, 240 VAC
    50/60 Hz AC; <600 W
    CE compliant

    Floor displacement

    <800 μin. (20 μm) below 10 Hz

     

    Controller Specifications

    Processor

    150/75 MHz dual core

    Sampling rate

    10 kHz

    Analog outputs

    16 channels

    Analog inputs

    16 channels

    Status light

    single LED

    Front panel ports

    1x serial USB 2.0
    1x serial Micro-USB
    1x Ethernet RJ-45
    2x BNC

    User interface

    Front panel LCD display
    Character menu on HyperTerminal
    Extended GUI for Microsoft Windows
    Embedded Ethernet GUI

     


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